摘要： 职称论文发表价格采用原子层沉积技术，在玻璃衬底上沉积AZO纳米叠层薄膜，制备了一种应用于微通道板打拿极导电层的薄膜。分析了热处理工艺对AZO薄膜电阻稳定性的影响，对AZO薄膜电阻进行了9种热处理工艺，获得了使薄膜电阻长期稳定的热处理工艺参数:在氩气和氮气的保护下，450℃退火60min,用该工艺能制备适应各种恶劣环境的电子倍增器件。
关键词： 薄膜电阻；微通道板打拿极；AZO薄膜；热处理
WANG Dan， DUANMU Qingduo*， WANG Guozheng， YANG Jikai
（ Faculty of Science, ChangChun University of Science and Technology, ChangChun 130022, China； ）
Abstract： In this paper，nano laminated preparation of AZO thin film was prepared on glass substrate by atomic layer deposition technology.It was a kind of thin film applicated in the micro channel plate with highly conductive layer. Analyzed the influence of heat treatment process of AZO thin films resistance stability, AZO thin film is deal with 9 kinds of heat treatment process, won the long-term stability of thin film resistance heat treatment process parameters: under the protection of argon and nitrogen, 450 ℃ annealing 60 min.Preparing by this process can adapt to all kinds of bad environment of multipactor components.
Keywords： thin film resistor; micro channel plate dynode; AZO thin film ;heat treatment
