摘要： 振动时效在职称论文发表价格里消除金属材料残余应力领域已得到认可并广泛用于金属材料残余应力消除，对于非金属材料的振动时效研究却少有报道。振动时效是将外部动应力与被激振材料自身的能量相叠加，实现残余应力的降低及均化。因此，从原理上讲振动时效可用于消除非金属材料残余应力。为研究振动时效对非金属材料应力消除效果，首先搭建一用于非金属材料振动时效的高频激振系统及用于测量薄膜/衬底系统曲率值的基片曲率激光测量装置。为确定振动时效激振频率，采用有限元方法对固化有非金属功能薄膜SU-8的薄膜/衬底系统进行模态分析，确定最佳激振频率为3kHz。结果表明：薄膜内部残余应力随振动时效时间增加逐渐减小，振动时效6min，薄膜从初始应力884.6kPa和1557.2kPa分别下降到241kPa和124kPa，振动时效可有效消除非金属功能薄膜SU-8内部残余应力。
关键词： 薄膜技术；振动时效；残余应力；基片曲率法；SU-8 薄膜。

Yang Qunfeng， Zheng Jianyi^*， Li Jiakai， Zhao Xuenan， Huang Weiwei， Lin Shujia

 

Abstract： The vibration stress relief for metal material aging has been widely recognized and utilized in the elimination of residual stress. However, experimental results of the vibration aging for the nonmetal material aging have rarely been reported. The micro-and macro-elastic-plastic deformation will be occurred and the stresses in the materials will be reduced and homogenized as the total stresses of the external dynamic stresses and the internal residual stresses in the materials are equal to or greater than the yield limit of materials, which is generally reckoned as the essence of the vibration aging. Hence, the vibration aging can also used in nonmetal materials' stress elimination. In this paper, the high frequency vibration system and laser measuring device were constructed, which were utilized to eliminate the residual stresses in the materials and to predict the curvature of the samples, respectfully. The finite element method was used to determined the frequency of vibration aging for nonmetal film of SU-8 photoresist film. According to the simulation results and performance of vibration exciter, the optimal excitation frequency 3kHz was adopted in this experiment. Results show that the residual stresses in the film decrease with the increasing of the vibration time, and the stresses in films decreased from the initial 886.4 kPa and 1557.2 kPa to 241kPa and 124kPa in vibration aging experiments for only 6 minutes, which proved that the vibration aging can effectively eliminate the residual stresses in the nonmetal material of the SU-8 photoresist film.
Keywords： Thin film technology, Vibration aging, Residual stress, Profile method, SU-8 thin film.