Abstract：
Because the characteristic scales of the MEMS and NEMS are getting smaller and smaller, the mechanical properties of micro/nano scale structures become a critical issue. The probes, which have the advantages of simple structure, small scale and high force and displacement sensitivities, are suitable for the mechanical testing at micro/nano scale, and are amenable to integration with other instruments. For example, the atomic force microscope (AFM), which uses probe to load and measure the microforce, is a typical cantilever probe based test system. However, the commercial AFM is generally used to observe the topography of the sample, and can\??t meet the requirement of gripping, loading and sensing in micro/nano scale mechanical experiments. In this paper, a micromechanical test system consisting of an AFM probe unit and a separately controlled sample stage is proposed. The system uses the probe unit as the force and displacement sensing unit, and the fractionized calibrated displacement stage as the sample stage. The stiffness and deformation of the samples can be measured, and the coupling deformation of the probe and the tested samples can be decoupled by using the separating control mode in the proposed system.
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