张耀平^1，*， 张云洞^2，， 凌宁^2，， 许鸿^2，

（  1、中国科学院光电技术研究所八室；       2、中国科学院光电技术研究所四川；  ）

摘要： 对光学职称论文多层膜热应力的计算，在以前的职称论文发表中已经存在很多模型，但是，由于各层之间必须满足一定的条件，随着膜层层数的增加，获得闭合解的困难性会增加，所以，在现存的模型中，为了简化计算，通常假定整个膜层具有一个弹性模量，从而可以很容易的获得闭合解，或者通过计算机进行数值模拟，而本文提出的分析模型，获得闭合解的困难性与膜层的层数相互独立，因而可以很易获得准确解。 

关键词： 残余应力； 光学多层薄膜系统 

Zhang Yaoping^*， Zhang Yundong， Ling Ning， Xu Hong

（  Institute of Optics and Electronics, Chinese Academy of Science, Chengdu 610209；  ）

Abstract： The calculation of thermal stress in optical multiplayer systems have been previously modeled. However, because the displacement compatibility condition at interfaces between layers must be satisfied, the complexity in obtaining a closed-form solution increases with the number of layers in the system. As a result, existing analyses often adopt simplifications(e.g. assuming a constant elastic modulus throughout the system) to obtain closed-form solution or are solved numerically by computer. The present study develops an analytical model, in which the complexity in obtaining a closed-form solution is independent of the number of layers and an exact closed-form solution can be concisely formulated
Keywords： Residual stress； optical multiplayer film systems

 

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